Acronyms, Abbreviations, and Initialisms.
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The meaning of the Acronym LPSM is...

LPSM is

  • Levenson Phase Shift Mask

LPSM is also in:

Acronym Definition Searched: R POST NHK 28315 CHEERS QFP USEPA QVP PDP PWG SDI WE DBT (NCTR) MVFAC 24115